Published October 1, 1981
| Version v1
Journal article
Stimulation of low energy (shallow) implants using target tilt
- 1. Royal Melbourne Inst. of Tech. (Australia). Dept. of Communication and Electronic Engineering
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Nucl. Instrum. Methods Phys. Res.
- Journal Volume
- 189
- Journal Issue
- 1
- Series
- Nucl. Instrum. Methods Phys. Res.
- Journal Page Range
- 133
- ISSN
- 0029-554X
Conference
- Title
- 3. international conference on ion implantation equipment and techniques.
- Dates
- 8 - 11 Jul 1980.
- Place
- Kingston, Canada.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 13659464
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- INDIUM IONS; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; SILICON; SIMULATION; SPATIAL DISTRIBUTION
- Descriptors DEC
- ATOMIC IONS; BEAMS; CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; SEMIMETALS
Optional Information
- Notes
- Published in summary form only.