Published July 1, 2015 | Version v1
Journal article

Relief evolution of HOPG under high-fluence 30 keV argon ion irradiation

  • 1. MATI – Russian State Technology University, Moscow (Russian Federation)
  • 2. Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow (Russian Federation)
  • 3. NIIgraphite, Moscow (Russian Federation)

Description

The results of the experimental study of sputtering and erosion of the basal plane of HOPG under irradiation with 30-keV Ar+ in the range from RT to 400 °C are presented. It has been found that developed at elevated (⩾250 °C) temperatures needle-like microscopic relief results in twofold sputtering yield increase (Y ≈ 2) in comparison with sputtering of a surface with an etch pits microscopic relief at the temperatures less than the ion-induced texture transition temperature Tt ≈ 150 °C. The effects of ion-induced graphite relief on high-dose sputtering have been studied using binary-collision computer simulation. The relief was modeled as a sine function surface along two mutually perpendicular surface axes. The simulation has shown that at some parameters of the relief the essential part of the bombarding ions undergoes inclined incidence on the walls of surface hillocks, which increases the density of ion-atom collisions near the surface and, correspondingly, the ejection of atoms. This effect leads to non-monotonic behavior of the sputtering yield on the relief aspect ratio (amplitude/period). The sputtering yield decreases upon reaching the maximum at aspect ratio of 4, and becomes lower than that for a flat surface. The simulation permits to estimate the relation of amplitude to period of relief at T < Tt

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2014.11.071

Additional details

Identifiers

DOI
10.1016/j.nimb.2014.11.071;
PII
S0168-583X(14)00952-5;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
354
Journal Page Range
p. 146-150
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
26. international conference on atomic collisions in solids
Acronym
ICACS26
Dates
14-18 Jul 2014
Place
Debrecen (Hungary)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47037472
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON IONS; ASPECT RATIO; ATOM COLLISIONS; COMPUTERIZED SIMULATION; GRAPHITE; IRRADIATION; KEV RANGE 10-100; SPECTROSCOPY; SPUTTERING; SURFACES; TRANSITION TEMPERATURE; YIELDS
Descriptors DEC
CARBON; CHARGED PARTICLES; COLLISIONS; DIMENSIONLESS NUMBERS; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; MINERALS; NONMETALS; PHYSICAL PROPERTIES; SIMULATION; THERMODYNAMIC PROPERTIES

Optional Information

Copyright
Copyright (c) 2014 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.