Published 1995 | Version v1
Miscellaneous Open

DLTS study of deep penetration defects in Si after hot iron bombardment

  • 1. Institute of Semiconductor Physics, Novosibirsk (Russian Federation)

Description

Short communication

Files

28080465.pdf

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Part of:
Ninth international conference on ion beam modification of materials. Book of abstracts

Additional details

Additional titles

Augmented title (English)
Deep level transient spectroscopy

Publishing Information

Publisher
Accademic Press.
Imprint Title
Ninth international conference on ion beam modification of materials. Book of abstracts
Imprint Pagination
452 p.
Journal Page Range
p. 10003.
Report number
INIS-AU--0004

Conference

Title
9. international conference on ion beam modification of materials.
Acronym
IBMM'95
Dates
5-10 Feb 1995.
Place
Canberra (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
28080465
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ARGON IONS; COMPUTERIZED SIMULATION; CRYSTAL DEFECTS; ION IMPLANTATION; KEV RANGE 100-1000; NEON IONS; PENETRATION DEPTH; POINT DEFECTS; SILICON; SPECTROSCOPY; TEMPERATURE DEPENDENCE; XENON IONS
Descriptors DEC
CHARGED PARTICLES; CRYSTAL STRUCTURE; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; SEMIMETALS; SIMULATION

Optional Information