The study for the water vapour permeation rate of the vacuum equipment

The vacuum equipment adopt rubber to seal. For the rubber the water vapour has high permeation rate. Water vapour get into the vacuum equipment will make the pressure inside risen and react with the material. For the reason, it is necessary for researching the permeation rates of water vapour of the vacuum equipment. In order to acquire it, this article makes a research. It uses static pressure rise test method data to calculate the water vapour permeation rates, uses degas method to keep the background gas stability, uses dry air and water vapour mix together to get the humidity which the research needing. lt designed the water vapour permeation rate test equipment, which according with the test requested. Pass through testing to get the water vapour permeation rates of the vacuum equipment, and the regular is water vapour permeation rates and the humidities are linear relation when in the constant temperature. The research provides a technique to guarantee for the study of the water vapour permeation rate of the vacuum equipment. (authors)