Published July 6, 2016 | Version v1
Journal article Metadata-only

Fabrication of nanostructured Al-doped ZnO thin film for methane sensing applications

Creators

  • 1. NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Selangor (Malaysia)
  • 2. Faculty of Electrical Engineering, Universiti Teknologi MARA Cawangan Johor, Kampus Pasir Gudang, 81750 Masai, Johor (Malaysia)
  • 3. Faculty of Electrical Engineering, Universiti Teknologi MARA Sarawak, Kampus Kota Samarahan Jalan Meranek, Sarawak (Malaysia)
  • 4. Dimensional Materials Research Centre (LDMRC), Department of Physics, Faculty of Science, University ofMalaya, 50603 Kuala Lumpur (Malaysia)
  • 5. Research Chair of Targeting and Treatment Cancer Using Nanoparticles, Department Of Biochemistry, College Of Science, King Saud University, P.O: 2454 Riyadh 11451 (Saudi Arabia)
  • 6. NANO-SciTech Centre (NST), Institute of Science, Universiti Teknologi MARA, 40450 Shah Alam, Selangor (Malaysia)

Description

CH4 gas sensor was fabricated using spin-coating method of the nanostructured ZnO thin film. Effect of annealing temperature on the electrical and structural properties of the film was investigated. Dense nanostructured ZnO film are obtained at higher annealing temperature. The optimal condition of annealing temperature is 500°C which has conductivity and sensitivity value of 3.3 × 10−3 S/cm and 11.5%, respectively.

Additional details

Identifiers

DOI
10.1063/1.4948883;

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1733
Journal Issue
1
Journal Page Range
vp.
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
International conference on nano-electronic technology devices and materials 2015
Acronym
IC-NET 2015
Dates
27 Feb - 2 Mar 2015
Place
Selangor (Malaysia)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
48054632
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; DOPED MATERIALS; METHANE; NANOSTRUCTURES; SENSITIVITY; SENSORS; SPIN; SPIN-ON COATING; THIN FILMS; ZINC OXIDES
Descriptors DEC
ALKANES; ANGULAR MOMENTUM; CHALCOGENIDES; DEPOSITION; FILMS; HEAT TREATMENTS; HYDROCARBONS; MATERIALS; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PARTICLE PROPERTIES; SURFACE COATING; ZINC COMPOUNDS

Optional Information

Notes
(c) 2016 Author(s)