Compact synchrotron radiation ring for industrial X-ray light source

X-ray has widely been used at the fields of structural analysis of matters and proteins, X-ray topography, fluorescence X-ray analysis, photoelectron spectroscopy, X-ray lithography, X-ray processing, and so on. On a base of research on the X-ray lithography, various compact synchrotron (SR) ring capable of forming intense X-ray were developed in Japan. As some processing techniques using X-ray, SR etching technique (TIEGA technique) making possible on micro-processing of difficult-processing PTFE resins and LIGA technique making possible on fine and high aspect processing, except the X-ray lithography are now focused. As the compact SR ring can form intense X-ray with good quality and radiate to wide ranged area, it can be listed to a light source with fast processing capacity and economy required for industrial uses at a field of nano-technology. Here was introduced on the compact SR ring through a normal-conducting compact SR ring, AURORA-2S, developed as a light source for X-ray lithography and industrial use. (G.K.)