Published 2003
| Version v1
Miscellaneous
Sol-gel preparation and properties of different materials for application in microelectronics
Creators
- 1. Advanced Materials Research Laboratory, F. Skorina Gomel State University, Gomel (Belarus)
- 2. Institute of Low Temperature and Structure Research, Polish Academy of Sciences, Wroclaw (Poland)
Description
no abstract available
Additional details
Publishing Information
- Imprint Title
- Abstracts of International Conference on Sol-Gel Materials' 03
- Imprint Pagination
- 103 p.
- Journal Page Range
- p. 43
Conference
- Title
- International Conference on Sol-Gel Materials' 03
- Dates
- 15-20 Jun 2003
- Place
- Szklarska-Poreba (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 35098715
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- ALKOXIDES; BORON ADDITIONS; DOPED MATERIALS; ELECTRIC CONDUCTIVITY; FILMS; MICROELECTRONICS; OPACITY; OPTIMIZATION; SILANES; SILICON; SOL-GEL PROCESS; SUBSTRATES; THICKNESS
- Descriptors DEC
- ALLOYS; BORON ALLOYS; DIMENSIONS; ELECTRICAL PROPERTIES; ELEMENTS; HYDRIDES; HYDROGEN COMPOUNDS; MATERIALS; OPTICAL PROPERTIES; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; PHYSICAL PROPERTIES; SEMIMETALS; SILICON COMPOUNDS