Published May 2003
| Version v1
Journal article
Highly oriented SrTiO3 thin film on Si deposited by magnetron sputtering
Creators
- 1. Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong (China)
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1116/1.1558551;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 21
- Journal Issue
- 3
- Journal Page Range
- p. 825-826
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35032284
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- DEPOSITION; GRAIN ORIENTATION; MAGNETRONS; SILICON; SPUTTERING; STRONTIUM COMPOUNDS; THIN FILMS; TITANATES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; ORIENTATION; OXYGEN COMPOUNDS; SEMIMETALS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2003 American Vacuum Society.