Unfolding of concentration profiles from backscatte-- ring energy spectra with allowance for some distortion factors

The solution of the problem of determination of molar shares of atoms rsub(a)(X)--Nsub(a)/(X)/[Σsub((=))sup(N)nc(X)] (a=1, 2...) in the N component target depending on (X) depth using the measured energy spectra of ion backscattering from multicomponent targets, is given. For solution, it is advisable to take such rsub(a)(X) (a=1, 2...) functions which give the maximUm to the following functional Msub(α)[ (X), U(E)], where Usub(n)(Esub(i)) is the value of n-spectrum at E=Esub(i). It is noted that Msub(α)(r, U) functional is positively determined and it is possible to use many of the methods known for its minimization