Published April 1, 2013
| Version v1
Journal article
Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 12C, 16O, 35Cl, 79Br and 127I ions
- 1. Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, University of Helsinki (Finland)
- 2. Department of Chemistry, Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FIN-00014, University of Helsinki (Finland)
Description
Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 0.03–1 MeV/u 12C, 16O, 35Cl, 79Br and 127I ions have been measured by the transmission technique employing a Time of Flight-Elastic Recoil Detection Analysis (ToF-ERDA) setup. Simulation of experimental slowing down energy spectra was employed to obtain stopping cross section curves over a continuous energy range. The experimental results are compared with the predictions of the SRIM2012 parameterization and literature data
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nimb.2013.02.010Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2013.02.010;
- PII
- S0168-583X(13)00240-1;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 300
- Journal Page Range
- p. 1-5
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45065049
- Subject category
- S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
- Descriptors DEI
- ALUMINIUM OXIDES; BROMINE 79; CARBON 12; CHLORINE 35; CROSS SECTIONS; DEPOSITION; DETECTION; ENERGY SPECTRA; HEAVY IONS; IODINE 127; LAYERS; MEV RANGE 01-10; OXYGEN 16; SILICON NITRIDES; TANTALUM OXIDES; TIME-OF-FLIGHT METHOD
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BROMINE ISOTOPES; CARBON ISOTOPES; CHALCOGENIDES; CHARGED PARTICLES; CHLORINE ISOTOPES; ENERGY RANGE; EVEN-EVEN NUCLEI; INTERMEDIATE MASS NUCLEI; IODINE ISOTOPES; IONS; ISOMERIC TRANSITION ISOTOPES; ISOTOPES; LIGHT NUCLEI; MEV RANGE; NITRIDES; NITROGEN COMPOUNDS; NUCLEI; ODD-EVEN NUCLEI; OXIDES; OXYGEN COMPOUNDS; OXYGEN ISOTOPES; PNICTIDES; RADIOISOTOPES; REFRACTORY METAL COMPOUNDS; SECONDS LIVING RADIOISOTOPES; SILICON COMPOUNDS; SPECTRA; STABLE ISOTOPES; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.