Published April 1, 2013 | Version v1
Journal article

Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 12C, 16O, 35Cl, 79Br and 127I ions

  • 1. Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, University of Helsinki (Finland)
  • 2. Department of Chemistry, Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FIN-00014, University of Helsinki (Finland)

Description

Stopping cross sections of atomic layer deposited Al2O3 and Ta2O5 and of Si3N4 for 0.03–1 MeV/u 12C, 16O, 35Cl, 79Br and 127I ions have been measured by the transmission technique employing a Time of Flight-Elastic Recoil Detection Analysis (ToF-ERDA) setup. Simulation of experimental slowing down energy spectra was employed to obtain stopping cross section curves over a continuous energy range. The experimental results are compared with the predictions of the SRIM2012 parameterization and literature data

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2013.02.010

Additional details

Identifiers

DOI
10.1016/j.nimb.2013.02.010;
PII
S0168-583X(13)00240-1;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
300
Journal Page Range
p. 1-5
ISSN
0168-583X
CODEN
NIMBEU

Optional Information

Copyright
Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.