Comparison of ion range distributions obtained by different Monte Carlo codes with different electronic stopping powers

A Monte Carlo simulation program was developed to calculate ion range distributions in amorphous targets. In order to test to what degree the electronic stopping power can affect the range distribution, the ZBL universal potential, which is used in TRIM89, and an experimentally fitted four-parameter electronic stopping power are adopted to treat energy losses in our simulation. Results obtained by our simulation are in good agreement with both experimental and theoretical results. Some of these give improved agreement with the experiment as compared with TRIM89 simulation. (orig.)