Published October 19, 1983 | Version v1
Patent Metadata-only

Circuit arrangement for controlling particle beams

Creators

Description

A digital circuit arrangement has been developed for controlling the particle beam in producing textured areas in particle beam devices with linear multideflexion systems. It has been aimed at increasing the speed of area texturing in the production of microelectronic circuits

Availability note (English)

Available from BUCHEXPORT, DDR-7010 Leipzig.

Additional details

Additional titles

Original title (German)
Schaltungsanordnung zur Steuerung eines Korpuskularstrahls

Publishing Information

Imprint Pagination
vp.
IPC:
Int. Cl. H01j37/24; G09g1/00.
IPC
Int. Cl. H01j37/24; G09g1/00.
Patent number
DD patent document 203429/B/

INIS

Country of Publication
German Democratic Republic
Country of Input or Organization
German Democratic Republic
INIS RN
15014017
Subject category
S22: GENERAL STUDIES OF NUCLEAR REACTORS;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
CONTROL SYSTEMS; DIGITAL CIRCUITS; PARTICLE BEAMS
Descriptors DEC
BEAMS; ELECTRONIC CIRCUITS