Development of an industrial CO2 laser for mask marking

We developed and commercialized an industrial pulsed TEA CO2 laser with high power and high repetition rate for printing characters and figures. Several commercial models have been investigated in design and performance. We improved its quality to the level of commercial TEA CO2 laser by an endurance test for each parts of laser system. The maximum pulse energy and repetition rate of our laser were above 5 J/pulse and 20 pps, respectively. Moreover, we designed the resolving power could be possible to 10 line/mm. Many optical parts were localized and lowered much in cost. Only few parts were imported and almost 90% in cost were localized. Also, to accellerate the commercialization by the joint company, the training and transfer of technology were pursued in the joint participation in design and assembly by company researchers from the early stage. (Author)