Ion-beam mixing of metals: surface composition changes

Method of ion-beam mixing of materials is considered, its advantages over direct ion implantation are shown. Physical processes, taking place during ion-beam mixing of metals and responsible for change of composition of nearthe-surface lauers, are considered: usual and preferable sputtering, implantation of direct recoil atoms, cascade (isotropic) mixing, thermal peak model, effect of chemical moving forces, radiation-induced diffusion, radiation-induced segregation and Gibbs adsorption. It is noted, that control of solid body properties under known treatment conditions requires the account of superposition of all mentioned processes