Incident ion energy spectrum and target sputtering rate in dc planar magnetron

A model which permits the calculation of the energy spectrum of the ions striking the cathode of a dc planar magnetron and, thus, the prediction of the cathode sputtering rate is discussed. The theoretical description is based on the consideration of the ionization process taking place in the discharge cathode sheath in terms of mobility theory. The predicted ion energy distributions and target sputtering rates are in good agreement with those measured. (author)