Published 1991 | Version v1
Book Metadata-only

Dose evaluation in electron beam processing of power semiconductor devices

Creators

  • 1. Consiglio Nazionale delle Ricerche, Bologna (Italy). Lab. di Fotochimica e Radiazioni d'Alta Energia
  • 2. Bologna Univ. (Italy). Ist. di Fisica
  • 3. Ansaldo SpA, Genoa (Italy)
  • 4. Magyar Tudomanyos Akademia, Budapest (Hungary). Izotopintezete

Description

A 12 MeV linear accelerator has been used for electron beam processing of power semiconductor devices to modify and improve their electrical properties. In order to control the quality of different types of power devices irradiated by electron beams a simple, quick and reliable system for measuring the dose had to be developed. The paper presents the results obtained using a ''charge collector'' which measures the charge absorbed in a graphite target exposed in air. Calibration of the system with a primary reference dosimeter and comparison with the results obtained using plastic routine dosimeters are discussed. (author). 11 refs, 4 figs, 3 tabs

Part of:
High dose dosimetry for radiation processing

Additional details

Publishing Information

Publisher
IAEA.
Imprint Place
Vienna (Austria)
ISBN
92-0-010291-3
Imprint Title
High dose dosimetry for radiation processing
Imprint Pagination
513 p.
Series
Proceedings series.
Journal Page Range
p. 83-92.
ISSN
0074-1884

Conference

Title
International symposium on high dose dosimetry for radiation processing.
Dates
5-9 Nov 1990.
Place
Vienna (Austria).

INIS

Country of Publication
Austria
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
22090607
Subject category
S07: ISOTOPES AND RADIATION SOURCES; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CALIBRATION; CHEMICAL DOSEMETERS; COMPARATIVE EVALUATIONS; DOSIMETRY; EVALUATION; GRAPHITE; IRRADIATION; IRRADIATION DEVICES; LINEAR ACCELERATORS; PERSPEX; RADIATION DOSE DISTRIBUTIONS
Descriptors DEC
ACCELERATORS; CARBON; DOSEMETERS; ELEMENTS; ESTERS; MEASURING INSTRUMENTS; NONMETALS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS

Optional Information

Secondary number(s)
IAEA-SM--314/14.