Particle detector spatial resolution
Description
Method and apparatus for producing separated columns of scintillation layer material, for use in detection of X-rays and high energy charged particles with improved spatial resolution is disclosed. A pattern of ridges or projections is formed on one surface of a substrate layer or in a thin polyimide layer, and the scintillation layer is grown at controlled temperature and growth rate on the ridge-containing material. The scintillation material preferentially forms cylinders or columns, separated by gaps conforming to the pattern of ridges, and these columns direct most of the light produced in the scintillation layer along individual columns for subsequent detection in a photodiode layer. The gaps may be filled with a light-absorbing material to further enhance the spatial resolution of the particle detector. 12 figs
Availability note (English)
Available from Patent and Trademark Office, Box 9, Washington, DC 20232 (United States).Additional details
Publishing Information
- Imprint Pagination
- [10 p.].
- IPC:
- Int. Cl. G01T 1/20; H01L 25/00; H01L 21/306; B44C 1/22.
- IPC
- Int. Cl. G01T 1/20; H01L 25/00; H01L 21/306; B44C 1/22.
- Patent number
- US patent document 5,171,996/A/
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 25074550
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- CHARGED PARTICLE DETECTION; DESIGN; FABRICATION; PHOTODIODES; SCINTILLATION COUNTERS; X-RAY DETECTION
- Descriptors DEC
- DETECTION; MEASURING INSTRUMENTS; RADIATION DETECTION; RADIATION DETECTORS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES
Optional Information
- Secondary number(s)
- US patent application 7-738,529.