Published December 15, 1992 | Version v1
Patent

Particle detector spatial resolution

Description

Method and apparatus for producing separated columns of scintillation layer material, for use in detection of X-rays and high energy charged particles with improved spatial resolution is disclosed. A pattern of ridges or projections is formed on one surface of a substrate layer or in a thin polyimide layer, and the scintillation layer is grown at controlled temperature and growth rate on the ridge-containing material. The scintillation material preferentially forms cylinders or columns, separated by gaps conforming to the pattern of ridges, and these columns direct most of the light produced in the scintillation layer along individual columns for subsequent detection in a photodiode layer. The gaps may be filled with a light-absorbing material to further enhance the spatial resolution of the particle detector. 12 figs

Availability note (English)

Available from Patent and Trademark Office, Box 9, Washington, DC 20232 (United States).

Additional details

Publishing Information

Imprint Pagination
[10 p.].
IPC:
Int. Cl. G01T 1/20; H01L 25/00; H01L 21/306; B44C 1/22.
IPC
Int. Cl. G01T 1/20; H01L 25/00; H01L 21/306; B44C 1/22.
Patent number
US patent document 5,171,996/A/

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
25074550
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
CHARGED PARTICLE DETECTION; DESIGN; FABRICATION; PHOTODIODES; SCINTILLATION COUNTERS; X-RAY DETECTION
Descriptors DEC
DETECTION; MEASURING INSTRUMENTS; RADIATION DETECTION; RADIATION DETECTORS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES

Optional Information

Secondary number(s)
US patent application 7-738,529.