Published September 23, 1991 | Version v1
Journal article

Submicron-scale surface roughening induced by ion bombardment

  • 1. Department of Physics, University of California, Los Angeles, California (USA)
  • 2. Department of Chemistry and Biochemistry, University of California, Los Angeles, California (USA)

Description

The scanning tunneling microscope (STM) was used to quantitatively investigate nonequilibrium surfaces of graphite roughened by sputter etching with 5-keV Ar ions. The resulting surface morphology depended strongly on the ion flux and fluence, as well as the sample temperature. The height-correlation functions of the roughened surfaces were calculated directly from the STM topographs and compared to linear-response theory and scaling analyses for the propagation of growing fronts. The surfaces developed correlated structures characterized by a length that diverged with increasing ion fluence

Additional details

Publishing Information

Journal Title
Physical Review Letters
Journal Volume
67
Journal Issue
13
Series
Phys. Rev. Lett.
Journal Page Range
1759-1762
ISSN
0031-9007
CODEN
PRLTA

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
23007571
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON IONS; GRAPHITE; KEV RANGE 01-10; PHYSICAL RADIATION EFFECTS; ROUGHNESS; SPUTTERING; SURFACE PROPERTIES; TEMPERATURE DEPENDENCE
Descriptors DEC
CARBON; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; NONMETALS; RADIATION EFFECTS