Published April 24, 2014
| Version v1
Journal article
Structure and mechanical properties of 3dTM ion doped RF sputtered ZnO thin films on Si (100)
Creators
- 1. School of Physics, University of Hyderabad, Central University P.O, Hyderabad-500046 (India)
Description
Mn, Fe and Mn-Fe doped ZnO thin films were deposited on Si (100) substrates by rf- magnetron sputtering using ceramic target in pure oxygen gas environment. The X-ray diffraction shows the polycrystalline wurtzite structure films. The average grain size varies from 32-50 nm, with lower grain size for Fe doped ZnO films. The room temperature loading and unloading curve are continuous without any pop-in. The Young's modulus and hardness are in the range 156-178 GPa and 14-15.5 GPa respectively
Additional details
Identifiers
- DOI
- 10.1063/1.4872825;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 1591
- Journal Issue
- 1
- Journal Page Range
- p. 980-981
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 58. DAE solid state physics symposium 2013
- Dates
- 17-21 Dec 2013
- Place
- Patiala, Punjab (India)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45092311
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CERAMICS; CRYSTAL STRUCTURE; DOPED MATERIALS; GRAIN SIZE; HARDNESS; OXYGEN; POLYCRYSTALS; PRESSURE RANGE GIGA PA; SILICON; SPUTTERING; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; X-RAY DIFFRACTION; YOUNG MODULUS; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; CRYSTALS; DIFFRACTION; ELEMENTS; FILMS; MATERIALS; MECHANICAL PROPERTIES; MICROSTRUCTURE; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PRESSURE RANGE; SCATTERING; SEMIMETALS; SIZE; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Notes
- (c) 2014 AIP Publishing LLC