Published September 2003
| Version v1
Journal article
Electronic materials growth: A retrospective and look forward
Creators
- 1. Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, California 92093-0407 (United States)
Description
This article reviews the development of electronic materials, primarily III-V compound semiconductors, from substrates to epitaxy and in situ monitoring to heterostructures, quantum wells and superlattices, that are important to various device applications. As the current research direction leads to the immediate future, the article then summarizes some of the recent advancement in quantum wires, nanowires, and quantum dots
Additional details
Identifiers
- DOI
- 10.1116/1.1599864;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 21
- Journal Issue
- 5
- Journal Page Range
- p. S160-S166
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36027928
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- CRYSTAL GROWTH; NANOSTRUCTURES; QUANTUM DOTS; QUANTUM WELLS; QUANTUM WIRES; SEMICONDUCTOR MATERIALS; SUPERLATTICES; VAPOR PHASE EPITAXY
- Descriptors DEC
- CRYSTAL GROWTH METHODS; EPITAXY; MATERIALS; NANOSTRUCTURES
Optional Information
- Notes
- (c) 2003 American Vacuum Society.