Published 2001
| Version v1
Miscellaneous
Study of the influence of metastable atoms in an RF argon discharge using PIC simulation and Langmuir probe measurements
- 1. Centro Tecnico Aeroespacial, Sao Jose dos Campos, SP (Brazil). Inst. Tecnologico de Aeronautica. Dept. de Fisica
- 2. Sao Paulo Univ., SP (Brazil). Escola Politecnica. Lab. de Sistemas Integraveis
Description
no abstract available
Additional details
Additional titles
- Original title (English)
- Resumos do 6. Encontro brasileiro de fisica dos plasmas
Identifiers
Publishing Information
- Imprint Title
- Abstracts of the 6. Brazilian meeting on plasma physics
- Imprint Pagination
- [83 p.]
- Journal Page Range
- [1 p.]
Conference
- Title
- 6. Brazilian meeting on plasma physics
- Original Conference Title
- 6. Encontro brasileiro de fisica dos plasmas
- Dates
- 1-5 Dec 2001
- Place
- Campos do Jordao, SP (Brazil)
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 35013785
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- ARGON; ENERGY LEVELS; ETCHING; IONIZED GASES; LANGMUIR PROBE; METASTABLE STATES; PLASMA; PLASMA DIAGNOSTICS; RF SYSTEMS
- Descriptors DEC
- ELECTRIC PROBES; ELEMENTS; ENERGY LEVELS; EXCITED STATES; FLUIDS; GASES; NONMETALS; PROBES; RARE GASES; SURFACE FINISHING
Optional Information
- Notes
- Imprint:Resumos do 6. Encontro brasileiro de fisica dos plasmas