Published 2001 | Version v1
Miscellaneous

Study of the influence of metastable atoms in an RF argon discharge using PIC simulation and Langmuir probe measurements

  • 1. Centro Tecnico Aeroespacial, Sao Jose dos Campos, SP (Brazil). Inst. Tecnologico de Aeronautica. Dept. de Fisica
  • 2. Sao Paulo Univ., SP (Brazil). Escola Politecnica. Lab. de Sistemas Integraveis

Description

no abstract available

Part of:
Abstracts of the 6. Brazilian meeting on plasma physics

Additional details

Additional titles

Original title (English)
Resumos do 6. Encontro brasileiro de fisica dos plasmas

Publishing Information

Imprint Title
Abstracts of the 6. Brazilian meeting on plasma physics
Imprint Pagination
[83 p.]
Journal Page Range
[1 p.]

Conference

Title
6. Brazilian meeting on plasma physics
Original Conference Title
6. Encontro brasileiro de fisica dos plasmas
Dates
1-5 Dec 2001
Place
Campos do Jordao, SP (Brazil)

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
35013785
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
ARGON; ENERGY LEVELS; ETCHING; IONIZED GASES; LANGMUIR PROBE; METASTABLE STATES; PLASMA; PLASMA DIAGNOSTICS; RF SYSTEMS
Descriptors DEC
ELECTRIC PROBES; ELEMENTS; ENERGY LEVELS; EXCITED STATES; FLUIDS; GASES; NONMETALS; PROBES; RARE GASES; SURFACE FINISHING

Optional Information

Notes
Imprint:Resumos do 6. Encontro brasileiro de fisica dos plasmas