Cross-sectional TEM specimen preparation for W/B₄C multilayer sample using FIB

A recent emergence of a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system have given choice to fabricate cross-sectional transmission electron microscopy (TEM) specimen of thin film multilayer sample. A 300 layer pair thin film multilayer sample of W/B₄C was used to demonstrate the specimen lift-out technique in very short time as compared to conventional cross-sectional sample preparation technique. To get large area electron transparent sample, sample prepared by FIB is followed by Ar⁺ ion polishing at 2 kV with grazing incident. The prepared cross-sectional sample was characterized by transmission electron microscope.