Published August 1991 | Version v1
Journal article Metadata-only

Formation of microstructure in high-temperature superconducting films by dry litography technique

Creators

Description

Formation peculiarities of microstructures with micron size elements are studied using laser vacuum projection lithography and ion etching in YBa2Cu3O7-δ HTSC-films. Microfigures are obtained in the given films with approx 1500 nm minimal sizes of elements. Phenomenon of growth of needle-shaped carbopn crystals in VR-1 vacuum resist applied on surface of HNSC-material due to the effect of 266 nm wave length ultraviolet irradiation is detected. Effect of lithographic process on electrophysical parameters of HNSC-films is studied

Additional details

Additional titles

Original title (Russian)
Formirovanie mikrostruktur v vysokotemperaturnykh sverkhprovodyashchikh plenkakh metodom sukhoj litografii

Publishing Information

Journal Title
Sverkhprovodimost': Fizika, Khimiya, Tekhnika
Journal Volume
4
Journal Issue
8
Journal Page Range
p. 1598-1602.
ISSN
0235-8964
CODEN
SFKTE6

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
24049402
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
BARIUM COMPOUNDS; CUPRATES; ELECTRIC CONDUCTIVITY; ETCHING; HIGH-TC SUPERCONDUCTORS; IMAGES; ION BEAMS; LASER RADIATION; MICROSTRUCTURE; PHASE STUDIES; SUBSTRATES; TEMPERATURE RANGE 0065-0273 K; YTTRIUM COMPOUNDS
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; BEAMS; COPPER COMPOUNDS; CRYSTAL STRUCTURE; ELECTRICAL PROPERTIES; ELECTROMAGNETIC RADIATION; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATIONS; SUPERCONDUCTORS; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS