An algorithm to calculate secondary sputtering by the reflection of ions in two dimensions

A method for computing the secondary sputtering of ions reflected from two-dimensional surfaces is described. The surface contour is first approximated by a set of line segments and the displacement of these line segments under ion erosion is determined computationally, by summing the contributions of the primary and reflected fluxes. This method can be used as an alternative to the method of characteristics which is normally used to determine primary ion beam effects. Some simple examples are evaluated. These examples illustrate that primary surface erosion theory is not in itself sufficient to explain the topography which can exist on an ion-eroded surface, particularly close to steep-sided structures. (author)