XPS investigations achieved on the first cycle of V2O5 thin films used in lithium microbatteries

Vanadium pentoxide thin films, usable as positive electrode in microbatteries, have been prepared by radio frequency magnetron sputtering in a pure argon or mixed argon/oxygen plasma. Depending on the oxygen pressure in the discharge gas, we have obtained either crystallized or amorphous thin films. These two kinds of thin films having different electrochemical behavior, an extensive X-ray photoelectron spectroscopy (XPS) study (especially suited for thin films analysis) was carried out. The main redox processes occurring during the first discharge-charge cycle were identified. In addition, depending on the crystalline or amorphous character of the samples, we have noticed some differences concerning the kinetic of reduction. Furthermore, the growth of a surface layer between the cathode and the liquid electrolyte was evidenced upon the discharge as well as its partial dissolution upon the charge