Published February 2012 | Version v1
Journal article

Transport properties of F− in SF6–Xe, SF6–Ar and SF6–He mixtures

  • 1. Université de Toulouse III: Université Paul Sabatier, Laplace, UMR 5213 du CNRS, UPS 31062 Toulouse cedex 9 (France)

Description

F− mobility was calculated in the gas mixtures SF6–Xe, SF6–Ar and SF6–He from a Monte Carlo code for ion transport simulation. The elastic momentum transfer cross sections were determined from the semi-classical JWKB approximation while the inelastic ones (detachment and charge transfer) were taken from the literature. The resulting collision cross section sets were validated from the good agreement between the calculated F− mobilities in the individual gases and the measured ones. Moreover, the longitudinal and transverse density normalized diffusion coefficients and the reaction rate coefficients were calculated in these mixtures for the case where the share of SF6 is 50%. Finally, a comparison of our calculated F− mobilities in these mixtures obtained from the Monte Carlo code and those obtained from linear Blanc's law showed good agreement in the case of SF6–Xe at low field but strong disagreement in the case of SF6–He mixture. However, at 2000 Td, deviation from Blanc's law is obtained for F− mobility in both mixtures. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/0963-0252/21/1/015014

Additional details

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
21
Journal Issue
1
Journal Page Range
[7 p.]
ISSN
0963-0252

INIS