Published 1971 | Version v1
Book

Electron paramagnetic resonance on divacancies in phosphorus-implanted silicon

Description

no abstract available

Additional details

Publishing Information

Publisher
Springer-Verlag New York, Inc.
Imprint Place
New York
Imprint Title
Ion Implantation in Semiconductors
Imprint Pagination
p. 39-46.

Conference

Title
2. international conference on ion implantation in semiconductors.
Dates
24 May 1971.
Place
Garmisch-Partenkirchen, Germany.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
3029754
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRON SPIN RESONANCE; ION IMPLANTATION; KEV RANGE 10-100; PHOSPORUS IONS; RADIATION EFFECTS; SILICON; VACANCIES
Descriptors DEC
CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; MAGNETIC RESONANCE; POINT DEFECTS; RESONANCE; SEMIMETALS