Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d₁₅ has much higher value than coupling coefficients d₃₁ and d₃₃, hence in the present work the micro cantilever beam actuated by d₁₅ effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done. The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.