Published May 2005 | Version v1
Journal article Metadata-only

Formation of dielectric microwave guides in the system of polymer/SiO2/Si with the help of ion irradiation

Creators

  • 1. Belgosuniversitet, Minsk (Belarus)
  • 2. RAN, Inst. Radiotekhniki i Ehlektroniki, Fryazino, Moskovskaya Obl. (Russian Federation)

Description

By spectral ellipsometry method with a binary modulation of polarization state, effects of ion implantation on optical properties of PMMA have been investigated. Physical aspects of ion irradiation induced optimization of the process of polymer/SiO2/Si-based dielectric microwaveguides formation as well as grounds for the choice of ion implantation conditions for stepwise and graded microwaveguides formation have been considered

Abstract (Russian)

Методом спектральной эллипсометрии с бинарной модуляцией состояния поляризации исследовано влияние ионной имплантации на оптические свойства пленок ПММА. Рассмотрены физические аспекты оптимизации процесса формирования диэлектрических микроволноводов на основе системы полимер/SiO2/Si при ионном облучении. Обоснован выбор параметров имплантации для формирования ступенчатых и градиентных микроволноводов

Additional details

Additional titles

Original title (Russian)
Формирование диэлектрических микроволноводов в системе полимер/SiO

Publishing Information

Journal Title
Fizika i Khimiya Obrabotki Materialov
Journal Issue
no.3
Journal Page Range
p. 79-84
ISSN
0015-3214
CODEN
FKOMAT

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
38011313
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ENERGY DEPENDENCE; HETEROJUNCTIONS; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; NITROGEN IONS; OPTICAL PROPERTIES; PHYSICAL RADIATION EFFECTS; PMMA; SILICON; SILICON OXIDES; WAVEGUIDES
Descriptors DEC
CHALCOGENIDES; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; ESTERS; IONS; KEV RANGE; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATION EFFECTS; SEMICONDUCTOR JUNCTIONS; SEMIMETALS; SILICON COMPOUNDS

Optional Information

Notes
25 refs., 3 figs., 1 tab.