Published September 1990 | Version v1
Report

Determination of electron energy distribution functions in surface wave produced plasmas. Pt. 1

  • 1. Bochum Univ. (Germany). Inst. fuer Experimentalphysik 2
  • 2. Sofia Univ. (Bulgaria). Faculty of Physics

Description

For surface wave produced argon plasmas in the 60-180 MHz range electron energy distribution functions are calculated from the electron Boltzmann equation solved in the Lorentz approximation. Breakdown and maintenance field strengths are determined self-consistently by statisfying additional balance equations. The influence of space charge fields and the limits of the approximations used are discussed. (orig.)

Availability note (English)

Available from FIZ Karlsruhe.

Additional details

Additional titles

Subtitle (English)
Modelling

Publishing Information

Imprint Pagination
43 p.
Report number
SFB--191-90-B3-05

INIS