Published February 21, 2004
| Version v1
Journal article
An off-axis multi-channel analyzer for secondary electrons
Creators
Description
The design, simulation and test of a new dispersive multi-channel analyzer are presented. Owing to the experimental voltage resolution of 50 mV and a spectrometer constant of 5.6x10-8 VA1/2s1/2 this analyzer is very well suited for voltage measurements in integrated circuits. The analyzer can also be used advantageously for a complete separation of secondary and backscattered electrons in the imaging mode. The parallel detection of a 20 eV band width of the secondary electron spectrum may be used in the future to attain characteristic material information at low primary electron energies <2 keV
Additional details
Identifiers
- DOI
- 10.1016/j.nima.2003.11.170;
- PII
- S0168900203030377;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
- Journal Volume
- 519
- Journal Issue
- 1-2
- Journal Page Range
- p. 325-330
- ISSN
- 0168-9002
- CODEN
- NIMAER
Conference
- Title
- 6. international conference on charged particle optics
- Dates
- 21-25 Oct 2002
- Place
- Greenbelt, MD (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Mexico
- INIS RN
- 35077893
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DESIGN; DIAGRAMS; ELECTRIC POTENTIAL; ELECTRON SPECTROSCOPY; ELECTRONS; EV RANGE 10-100; IMAGES; INTEGRATED CIRCUITS; KEV RANGE 01-10; MULTI-CHANNEL ANALYZERS; SCANNING ELECTRON MICROSCOPY; SIMULATION; SPECTRA; TESTING
- Descriptors DEC
- ELECTRON MICROSCOPY; ELECTRONIC CIRCUITS; ELECTRONIC EQUIPMENT; ELEMENTARY PARTICLES; ENERGY RANGE; EQUIPMENT; EV RANGE; FERMIONS; INFORMATION; KEV RANGE; LEPTONS; MICROELECTRONIC CIRCUITS; MICROSCOPY; PULSE ANALYZERS; SPECTROSCOPY
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.