Published November 1978 | Version v1
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Gas phase reaction of UF6 with SiH4

Description

The gas phase thermal reaction of UF6 with SiH4 begins at approx. 1350C producing fluorosilanes, predominantly SiH3F, as volatile products along with some nonvolatile black solids. Both unreacted SiH4 and UF6 were present with SiH3F after 25 min at 1450C

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS., PC A02/MF A01.

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Additional details

Publishing Information

Imprint Pagination
10 p.
Report number
UCID--17969