Published November 1978
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Gas phase reaction of UF6 with SiH4
Description
The gas phase thermal reaction of UF6 with SiH4 begins at approx. 1350C producing fluorosilanes, predominantly SiH3F, as volatile products along with some nonvolatile black solids. Both unreacted SiH4 and UF6 were present with SiH3F after 25 min at 1450C
Availability note (English)
MF available from INIS under the Report Number; Available from NTIS., PC A02/MF A01.Files
10460563.pdf
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Additional details
Publishing Information
- Imprint Pagination
- 10 p.
- Report number
- UCID--17969
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 10460563
- Subject category
- S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY;
- Descriptors DEI
- ACTIVATION ENERGY; CHEMICAL REACTIONS; GASES; HIGH TEMPERATURE; SILANES; TEMPERATURE DEPENDENCE; URANIUM HEXAFLUORIDE
- Descriptors DEC
- ACTINIDE COMPOUNDS; ENERGY; FLUIDS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; SILICON COMPOUNDS; URANIUM COMPOUNDS; URANIUM FLUORIDES