Published July 31, 1989 | Version v1
Journal article

Deposition and annealing of ion beam sputtered Y-Ba-Cu-O superconducting films

  • 1. Research Division, Raytheon Company, Lexington, Massachusetts 02173 (USA)

Description

Highly oriented, near-stoichiometric films of YBa2Cu3O/sub 7-δ/ have been deposited onto (100) MgO, (100) yttria-stabilized zirconia, and (110) SrTiO3 by ion beam sputtering from a single, off-stoichiometric target. Their crystal structure and resistance behavior were found to depend on the crystallization temperature of a two-step post-deposition anneal, which was varied from 750 to 1000 degree C. The highest zero-resistance temperature (73 K) and degree of preferred orientation was observed for a film which was deposited on (100) MgO and annealed for a short time at 950 degree C

Additional details

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
55
Journal Issue
5
Series
Appl. Phys. Lett.
Journal Page Range
501-503
ISSN
0003-6951
CODEN
APPLA