Published 1973 | Version v1
Book Metadata-only

Lateral stress measurements in ion-implanted metals and insulators

Creators

  • 1. Sandia Labs., Albuquerque, NM

Description

no abstract available

Additional details

Publishing Information

Publisher
Plenum Publishing Corp.
Imprint Place
New York
Imprint Title
Ion implantation in semiconductors and other materials
Imprint Pagination
p. 531-540.

Conference

Title
3. international conference on ion implantation in semi-conductors and other materials.
Dates
11 Dec 1972.
Place
Yorktown Heights, New York, USA.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
6190123
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
GLASS; HELIUM IONS; HYDROGEN IONS; ION IMPLANTATION; OXYGEN IONS; PHYSICAL RADIATION EFFECTS; RPL DOSEMETERS; STRESS ANALYSIS
Descriptors DEC
CHARGED PARTICLES; DOSEMETERS; IONS; LUMINESCENT DOSEMETERS; MEASURING INSTRUMENTS; RADIATION EFFECTS

Optional Information

Notes
Imprint:See CONF-721226--.