Published January 1994
| Version v1
Report
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The adaptation of IFJ implantation facilities for the IBAD (Ion Beam Assisted Deposition) in the dual beam technique
Creators
- 1. Institute of Nuclear Physics, Cracow (Poland)
Description
The progress in reconstruction of ion implantation facilities in the Institute of Nuclear Physics: new facilities for IBAD method and Dual Beam System are presented. 32 refs, 4 figs, 1 tab
Availability note (English)
MF available from INIS under the Report Number.Files
26048141.pdf
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Additional details
Additional titles
- Original title (Polish)
- Adaptacja implantatora IFJ do metody IBAD - Ion Beam Assisted Deposition w wersji ukladu dwoch wiazek jonow - Dual Beam Technique
Publishing Information
- Imprint Pagination
- 22 p.
- Report number
- INP--1660/AP
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 26048141
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- BEAM PRODUCTION; COLLIMATORS; CONSTRUCTION; EQUIPMENT; ION IMPLANTATION; ION SOURCES; VACUUM SYSTEMS
Optional Information
- Contract/Grant/Project number
- Grant KBN 77326 92 03