Published October 1, 1995
| Version v1
Journal article
Progress toward Lambda/20 extreme ultraviolet interferometry
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics and Nanometer Structures
- Journal Volume
- 13
- Journal Issue
- 6
- Journal Page Range
- [10 p.]
- ISSN
- 1520-8567
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 33060391
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ACCURACY; EFFICIENCY; EXTREME ULTRAVIOLET RADIATION; INTERFEROMETRY; PERFORMANCE
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; RADIATIONS; ULTRAVIOLET RADIATION
Optional Information
- Contract/Grant/Project number
- AC03-76SF00098
- Notes
- Journal Publication Date: November 1995
- Funding organization
- US Department of Energy (United States)
- Secondary number(s)
- LBL--37947; LBNL/ALS--124