Evaluation of oxygen in oxide materials by SIMS using 18O2 gas

SIMS analysis using 18O2 gas was applied to investigate the effects of oxygen diffusion from the atmosphere on thermal properties of a float glass. It was revealed that a phase separation was induced by the oxygen diffusion, resulting in degradation of the optical properties of the glass. The same analysis was performed for fluorine-doped SnO2 films grown by atmospheric chemical vapor deposition (APCVD). It was found that the amount of diffused 18O into the film was larger for the film with lower resistivity when the films were heat-treated in 18O2/N2 atmosphere. Based on the results obtained, the roles of oxygen in the electrical properties of the films are discussed