Published 2001
| Version v1
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Study of phosphorus ion implantation effect on electronic structure of silicon
- 1. Tashkentskij Gosudarstvennyj Tekhnicheskij Univ., Tashkent (Uzbekistan)
Description
no abstract available
Files
34049215.pdf
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Additional details
Additional titles
- Original title (Russian)
- Исследование влияния имплантации ионов фосфора на электронную структуру кремния
Publishing Information
- Publisher
- MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Theses of reports of 31. International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 160 p.
- Journal Page Range
- p. 136
- Report number
- INIS-RU--463
Conference
- Title
- 31. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- 31. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 28-30 May 2001
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 34049215
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ANNEALING; BAND THEORY; DEPTH; ELECTRON DIFFRACTION; ELECTRON SPECTROSCOPY; ELECTRONIC STRUCTURE; ENERGY GAP; ION IMPLANTATION; KEV RANGE; PHOSPHORUS IONS; RADIATION DOSES; SILICON; SILICON PHOSPHIDES; SPATIAL DISTRIBUTION; VALENCE
- Descriptors DEC
- CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; DIMENSIONS; DISTRIBUTION; DOSES; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; IONS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; SCATTERING; SEMIMETALS; SILICON COMPOUNDS; SPECTROSCOPY
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov 31. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami