Published November 1983 | Version v1
Miscellaneous Metadata-only

Helium microprobe analysis at Melbourne of semiconductor materials

Creators

  • 1. Melbourne Univ., Parkville (Australia). School of Physics

Description

The possibilities and problems in the use of a helium microprobe in the analysis of semiconductor materials are discussed. The technique of channeling contrast microscopy is described

Additional details

Publishing Information

Imprint Title
Third Australian conference on nuclear techniques of analysis
Imprint Pagination
201 p.
Journal Page Range
p. 65-67.
Report number
INIS-mf--9065

Conference

Title
3. Australian conference on nuclear techniques of analysis.
Dates
1-3 Nov 1983.
Place
Lucas Heights (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
15048432
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BACKSCATTERING; DOPED MATERIALS; ION CHANNELING; ION MICROPROBE ANALYSIS; SEMICONDUCTOR MATERIALS; SILICON
Descriptors DEC
CHANNELING; CHEMICAL ANALYSIS; ELEMENTS; MATERIALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; SCATTERING; SEMIMETALS