Measurement of energy distribution of low energy light ions through copper film and its statistical analysis

Energy distributions of protons and helium ions passing through copper films of thicknesses from 300 to 800 A have been measured in the energy range 4 to 16 keV, and the variation of the full width at half maximum with film thicknesses and average ion energies has been investigated. It is found that this width increases slightly with increasing film thickness and increases in a parabolic form with increasing average ion energy. Those experimental results are analyzed by the statistical procedure of the multiple inelastic collision in which the unevenness of film thickness is taken into consideration, and further, the inelastic scattering process is discussed. (auth.)