Published August 16, 1987
| Version v1
Journal article
Preparation of In2O3:Sn (ITO) films by electron beam deposition
- 1. Academy of Sciences of Vietnam, Hanoi. Inst. of Physics
Description
An electron beam technique has been employed for depositing In2O3:Sn films on targets consisting of pressed powders of In2O3 and SnO2 using an electron beam of 8 keV energy. The effect of annealing (in air or argon atmosphere) on the films has also been investigated. X-ray diffraction analysis shows that the films annealed at 450 0C were polycrystalline exhibiting a cubic In2O3 structure. Both SnO and SnO2 phases did not appear; this proves the substitutional doping of tin atoms in the In2O3 lattice. Electrical investigations give evidence that films with high transmittance and low resistivity may be prepared
Additional details
Publishing Information
- Journal Title
- Phys. Status Solidi A
- Journal Volume
- 102
- Journal Issue
- 2
- Series
- Phys. Status Solidi A.
- Journal Page Range
- K91-K94
- ISSN
- 0031-8965
- CODEN
- PSSAB
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 19007985
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANNEALING; CHEMICAL PREPARATION; CUBIC LATTICES; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; FILMS; INDIUM OXIDES; KEV RANGE 01-10; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; RECRYSTALLIZATION; SUBSTRATES; THICKNESS; TIN OXIDES; TRANSMISSION; X-RAY DIFFRACTION
- Descriptors DEC
- BEAMS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; CRYSTALS; DIFFRACTION; DIMENSIONS; ELECTRICAL PROPERTIES; ENERGY RANGE; HEAT TREATMENTS; INDIUM COMPOUNDS; KEV RANGE; LEPTON BEAMS; OXIDES; OXYGEN COMPOUNDS; PARTICLE BEAMS; PHYSICAL PROPERTIES; RADIATION EFFECTS; SCATTERING; SYNTHESIS; TIN COMPOUNDS
Optional Information
- Notes
- Short note.