Published July 2007 | Version v1
Journal article

Refractive index depth profile in PMMA due to proton irradiation

  • 1. Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary)
  • 2. Department of Optics and Quantum Electronics, University of Szeged, H-6701 Szeged, P.O. Box 406 (Hungary)
  • 3. Research Group on Laser Physics of the Hungarian Academy of Sciences, H-6701 Szeged, P.O. Box 406 (Hungary)
  • 4. Research Institute for Technical Physics and Materials Science of the Hungarian Academy of Sciences, H-1525 Budapest 114, P.O. Box 49 (Hungary)
  • 5. Department of Environmental Physics, University of Debrecen, H-4026 Debrecen, Poroszlay u. 6 (Hungary)

Description

Proton Beam Writing has been successfully used to create buried channel waveguides in PMMA, which suggested that proton irradiation increases the refractive index. To investigate this effect, PMMA samples were irradiated by 1.7-2.1 MeV proton beam. Spectroscopic ellipsometry has been used to investigate the depth profile of the refractive index. An increase of the refractive index was observed in the order of 0.01, which is approximately one order of magnitude higher than the detection limit. The highest increase of the refractive index occurs at the end of range, i.e. we found a good correlation with the Bragg curve of the energy loss

Additional details

Identifiers

DOI
10.1016/j.nimb.2007.02.052;
PII
S0168-583X(07)00430-2;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
260
Journal Issue
1
Journal Page Range
p. 400-404
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
10. international conference on nuclear microprobe technology and application; PBW II: 2. international workshop on proton beam writing
Acronym
ICNMTA2006
Dates
9-14 Jul 2006
Place
Singapore (Singapore)

Optional Information

Copyright
Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.