Evaluation of surface roughness parameters of metal films by light scattering technique

Light scattering is a powerful method to evaluate surface roughness parameters. From the information on radiation produced by the surface roughness we are able to get a pair of roughness parameter, i.e. the amplitude of surface corrugation and the transverse correlation length. However, the parameters evaluated by such a way cannot explain the whole angular distribution of scattered light intensity. We show that the angular distribution of scattered light intensity can be properly explained by a combination of several parameters. (author)