Published August 2009 | Version v1
Journal article Metadata-only

Dust formation in Ar/CH4 and Ar/C2H2 plasmas

Creators

  • 1. Institute for Experimental Physics II, Ruhr-University Bochum (Germany)

Description

This paper discusses the growth of nanoparticles in capacitively and inductively coupled radio-frequency plasmas operated in hydrocarbon gases and the back-reaction of particles on the plasma properties. The focus is on the growth mechanism in CH4- and C2H2-containing plasmas, on the role of atomic hydrogen and on the dynamic charging and decharging of particles in pulsed plasmas.

Availability note (English)

Available from http://dx.doi.org/10.1088/0963-0252/18/3/034010

Additional details

Identifiers

DOI
10.1088/0963-0252/18/3/034010;
PII
S0963-0252(09)86544-4;

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
18
Journal Issue
3
Journal Page Range
[8 p.]
ISSN
0963-0252

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
41058561
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
DUSTS; GASES; HYDROGEN; METHANE; NANOSTRUCTURES; PARTICLES; PLASMA; RADIOWAVE RADIATION
Descriptors DEC
ALKANES; ELECTROMAGNETIC RADIATION; ELEMENTS; FLUIDS; HYDROCARBONS; NONMETALS; ORGANIC COMPOUNDS; RADIATIONS