Published June 16, 2003 | Version v1
Journal article

Copper thin film of alternating textures

  • 1. Department of Physics and Institute of Nano Science and Technology, Hong Kong University of Science and Technology, Hong Kong (China)
  • 2. Department of Mechanical Engineering, Hong Kong Polytechnic University, Hong Kong (China)
  • 3. Department of Physics, Huazhong University of Science and Technology, Wuhan 430073 (China)
  • 4. Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute Troy, New York 12180 (United States)

Description

It is common for thin films to have a predominant texture, but not alternating textures. In this letter, we report a copper film of alternating textures through self-organization. Using dc magnetron sputtering technique, we deposit copper films on a SiO2/Si(111) substrate. A thin layer of copper of <111> texture is first developed, and another thin layer of <110> ensued. As deposition continues, a third layer of copper of <111> texture is formed on the top, leading to a sandwich copper thin film of alternating <111> and <110> textures. The film morphology is characterized with scanning electron microscopy and atomic force microscopy and the texture with x-ray diffraction. Based on anisotropic elastic analyses and molecular dynamics simulations, we propose a model of texture evolution during the formation of multilayers, attributing the texture evolution to the competition of surface and strain energies

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
82
Journal Issue
24
Journal Page Range
p. 4265-4267
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2003 American Institute of Physics.