Recoil mixing in high-fluence ion implantation

The effect of recoil mixing on the collection and depth distribution of implanted projectiles during high-fluence irradiation of a random solid is investigated by model calculations based on a previously published transport theoretical approach to the general problem of recoil mixing. The most pronouced effects are observed in the maximum implantable amount of projectiles and in the critical fluence for saturation. Both values are significantly increased by recoil mixing. (orig.)