A robust method for probe tip radius correction in coordinate metrology

A new algorithm for tip radius correction for the metrology of free-form and two-dimensional contours is proposed. The method is for use in a high-definition coordinate metrology context, as is now possible with scanning probes, where the density of points per scanned distance ensures that the successive probe ball positions overlap partially with each other. The proposed method for correcting measurements can be applied directly to the data collected during a coordinate measuring machine (CMM) measuring process. An additional advantage of the new algorithm is the possibility of detecting the incoherent corrected measured point, a form of validity check. The algorithm performance was verified experimentally on a Zeiss ACCURA CMM with an active VAST Gold scanning probe