Mass spectroscopic analysis of laser-induced plume produced by laser ablation of pyrolytic boron nitride

The laser ablation of pyrolytic boron nitride (pBN) target was investigated by time-of-flight quadrupole mass spectroscopy. According to the laser-correlated ion mass spectra, B+ and B2+ ions were produced but N+, N2+, or BN+ ions were not at laser fluences below 1 J/cm2. Instead, neutral N2 molecules were found to be formed. The mean velocities and kinetic energies of B+ ions were obtained by time-of-flight analysis. Also, the reactive laser ablation under N2 atmosphere has been attempted by using a pulsed valve synchronized with the laser pulse.