Published December 2002 | Version v1
Journal article Metadata-only

Ultraviolet photoelectron spectroscopy of GaAs surface implanted by barium ions

Creators

  • 1. Tashkentskij Gosudarstvennyj Tekhnicheskij Univ., Tashkent (Uzbekistan)

Description

Influence of laser annealing on the composition and electron structure of GaAs surface, implanted by Ba ions with energy of E0 = 0-5 and 1 keV has been studied by Auger electron spectroscopy and ultra-violet photoelectron spectroscopy methods. It has been found that annealing leads to a change of profile of the impurity atom distribution on the depth and of the electron structure of GaAs ion implanted surface

Abstract (Russian)

Методами оже-электронной и ультрафиолетовой фотоэлектронной спектроскопии исследовано влияние лазерного отжига на состав и электронную структуру поверхности GaAs, имплантированного ионами Ва с энергиями E0 = 0.5 и 1 кэВ. Установлено, что отжиг приводит к изменению профиля распределения атомов примеси по глубине и электронной структуры поверхности ионно-им-плантированного GaAs

Additional details

Additional titles

Original title (Russian)
Ультрафиолетовая фотоэлектронная спектроскопия поверхности GaAs, легированного ионами бария

Publishing Information

Journal Title
Poverkhnost'. Rentgenovskie, Sinkhrotronnye i Nejtronnye Issledovaniya
Journal Issue
no.12
Journal Page Range
p. 90-93
ISSN
1028-0960

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
35010365
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANNEALING; ATOMS; AUGER ELECTRON SPECTROSCOPY; BARIUM; BARIUM IONS; DEPTH; ELECTRONIC STRUCTURE; GALLIUM ARSENIDES; ION IMPLANTATION; LASER-RADIATION HEATING; PHOTOELECTRON SPECTROSCOPY; SPATIAL DISTRIBUTION; SURFACE PROPERTIES; ULTRAVIOLET RADIATION
Descriptors DEC
ALKALINE EARTH METALS; ARSENIC COMPOUNDS; ARSENIDES; CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; ELEMENTS; GALLIUM COMPOUNDS; HEAT TREATMENTS; HEATING; IONS; METALS; PLASMA HEATING; PNICTIDES; RADIATIONS; SPECTROSCOPY

Optional Information

Notes
15 refs., 4 figs., 1 tab.