Published 2003
| Version v1
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High-vacuum secondary-ion mass spectrometer for studying of etching process and surface structure of semiconductors and dielectrics at irradiating by electrons, mono- and polyatomic ions
- 1. Institute of Electronics AS RU, Tashkent (Uzbekistan)
Description
no abstract available
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39123392.pdf
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Additional details
Additional titles
- Original title (Russian)
- Сверхвысоковакуумный вторично-ионный масс-спектрометр для изучения травления и структуры поверхности полупроводников и диэлектриков при облучении электронами, моно и полиатомными ионами
Publishing Information
- Publisher
- Fiziko-tekhnicheskij institut, NPO 'Fizika-Solntse'
- Imprint Place
- Tashkent (Uzbekistan)
- Imprint Title
- Proceedings of the conference 'Fundamental and applied problems of physics'
- Imprint Pagination
- 494 p.
- Journal Page Range
- p. 381-383
- Report number
- INIS-UZ--133
Conference
- Title
- Conference on Fundamental and applied problems of physics consecrated to 60th anniversary of the Academy of Sciences of Uzbekistan and Physical-Technical Institute
- Original Conference Title
- Konferentsiya 'Fundamental'nye i prikladnye voprosy fiziki' posvyashchennaya 60--letiyu Akademii Nauk Respubliki Uzbekistan i Fiziko-Tekhnicheskogo Instituta
- Dates
- 27-28 Nov 2003
- Place
- Tashkent (Uzbekistan)
INIS
- Country of Publication
- Uzbekistan
- Country of Input or Organization
- Uzbekistan
- INIS RN
- 39123392
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ARGON 38 BEAMS; ARGON 40 BEAMS; DIELECTRIC MATERIALS; ELECTRONS; ETCHING; HEAVY IONS; MOLECULAR BEAMS; POTASSIUM CHLORIDES; RESONANCE IONIZATION MASS SPECTROSCOPY; SEMICONDUCTOR MATERIALS; SILICON CARBIDES; SURFACE CLEANING; SURFACES
- Descriptors DEC
- ALKALI METAL COMPOUNDS; BEAMS; CARBIDES; CARBON COMPOUNDS; CHARGED PARTICLES; CHLORIDES; CHLORINE COMPOUNDS; CLEANING; ELEMENTARY PARTICLES; FERMIONS; HALIDES; HALOGEN COMPOUNDS; ION BEAMS; IONS; LEPTONS; MASS SPECTROSCOPY; MATERIALS; POTASSIUM COMPOUNDS; SILICON COMPOUNDS; SPECTROSCOPY; SURFACE FINISHING
Optional Information
- Notes
- 1 ref., 1 fig., 1 tab.; This record replaces 39121192 Imprint:Trudy konferentsii 'Fundamental'nye i prikladnye voprosy fiziki'